Amasulutioni we-HVAC kuma-Clean Room we-Semiconductor: Ukufikiswa kwezinkinga eziphakeme zokulawula izimo

Izinqakatha Zokudesigna Kwe-System Yokuqondisa Kwesikhathi Esingaphansi Kwemithambo Yasezulwini Lwesiliconi

Kungani Izisitemu Zokudla Isikhathi Zokubhekana Ngokuzenzakalelayo Zihlukana Emizulwini Yokuphatha Okungaphansi Kwemithambo Yase-10nm

Izinhlangano zezindustria zokusebenzisa i-HVAC zingakwazi ukuthi zibe nempilo yokuqinisa, ukuthi zihlale kusobala, nokuthi zibe nesibalo sokuhlala kahle esidingekayo ukwenza izinkampani ezingu-10nm. Amathuba amaningi asezingeni leliyo ayizinye ngaphezu kwe-10 nm—kubanzi kakhulu kunezinye ezingaphezu kwe-0.3 µm okuyisibalo sokuhlanzwa kwezinhlangano zezindustria zokusebenzisa i-HEPA—kodwa lokhu kwenza ukuthi ukulahla kwezinhlangano zokusebenzisa i-HVAC kungasebenzi. Lezi zinhlangano zingakwazi ukuthi zihlale kusobala nokuthi zibe nesibalo sokuhlala kahle esidingekayo ukwenza ukuphatha kwemithambo ne-etching: isibalo sokuhlala kahle sengathi siyisinye ngaphezu kwe-±0.5°C noma ±2% RH singasiza ukuthi isikhumba sifanele, ukuthi isikhumba sifanele kanye noma ukuthi isikhumba sifanele kanye, okuzosiza ngqo ukuthi ukuthi isikhumba sifanele kanye noma ukuthi isikhumba sifanele kanye. Ngaphezu kwalokho, izinhlangano zokusebenzisa i-HVAC zingakwazi ukuthi zihlale kusobala nokuthi zibe nesibalo sokuhlala kahle esidingekayo ukwenza ukuphatha kwemithambo ne-etching: isibalo sokuhlala kahle sengathi siyisinye ngaphezu kwe-±0.5°C noma ±2% RH singasiza ukuthi isikhumba sifanele, ukuthi isikhumba sifanele kanye noma ukuthi isikhumba sifanele kanye, okuzosiza ngqo ukuthi ukuthi isikhumba sifanele kanye noma ukuthi isikhumba sifanele kanye. Ngaphezu kwalokho, izinhlangano zokusebenzisa i-HVAC zingakwazi ukuthi zihlale kusobala nokuthi zibe nesibalo sokuhlala kahle esidingekayo ukwenza ukuphatha kwemithambo ne-etching: isibalo sokuhlala kahle sengathi siyisinye ngaphezu kwe-±0.5°C noma ±2% RH singasiza ukuthi isikhumba sifanele, ukuthi isikhumba sifanele kanye noma ukuthi isikhumba sifanele kanye, okuzosiza ngqo ukuthi ukuthi isikhumba sifanele kanye noma ukuthi isikhumba sifanele kanye. Ngaphezu kwalokho, izinhlangano zokusebenzisa i-HVAC zingakwazi ukuthi zihlale kusobala nokuthi zibe nesibalo sokuhlala kahle esidingekayo ukwenza ukuphatha kwemithambo ne-etching: isibalo sokuhlala kahle sengathi siyisinye ngaphezu kwe-±0.5°C noma ±2% RH singasiza ukuthi isikhumba sifanele, ukuthi isikhumba sifanele kanye noma ukuthi isikhumba sifanele kanye, okuzosiza ngqo ukuthi ukuthi isikhumba sifanele kanye noma ukuthi isikhumba sifanele kanye. Ngaphezu kwalokho, izinhlangano zokusebenzisa i-HVAC zingakwazi ukuthi zihlale kusobala nokuthi zibe nesibalo sokuhlala kahle esidingekayo ukwenza ukuphatha kwemithambo ne-etching: isibalo sokuhlala kahle sengathi siyisinye ngaphezu kwe-±0.5°C noma ±2% RH singasiza ukuthi isikhumba sifanele, ukuthi isikhumba sifanele kanye noma ukuthi isikhumba sifanele kanye, okuzosiza ngqo ukuthi ukuthi isikhumba sifanele kanye noma ukuthi isikhumba sifanele kanye. Ngaphezu kwalokho, izinhlangano zokusebenzisa i-HVAC zingakwazi ukuthi zihlale kusobala nokuthi zibe nesibalo sokuhlala kahle esidingekayo ukwenza ukuphatha kwemithambo ne-etching: isibalo sokuhlala kahle sengathi siyisinye ngaphezu kwe-±0.5°C noma ±2% RH singasiza ukuthi isikhumba sifanele, ukuthi isikhumba sifanele kanye noma ukuthi isikhumba sifanele kanye, okuzosiza ngqo ukuthi ukuthi isikhumba sifanele kanye noma ukuthi isikhumba sifanele kanye. Ngaphezu kwalokho, izinhlangano zokusebenzisa i-HVAC zingakwazi ukuthi zihlale kusobala nokuthi zibe nesibalo......

Ukuthi kufanele kubhekwe ngokwesibalo se-ISO 14644-1 Class 1–5: Ukuthi kufanele kubhekwe ngokwesibalo sokuguqula komoya nokuthi kufanele kubhekwe ngokwesibalo sokugcina isikhumba

Ukufikwa kwe-ISO 14644-1 Class 1–5 kudinga indlela ejabulisayo ephakanyisiweyo ekubeni kuyisibonelo sokuguqula isilwane (ACH) nokuphatha ngokuzimisa ukuguqula isilwane ngokuphelele. Amakhambi okuhlanzekileyo ase-Class 1 ayidinga ukuguqula isilwane ngokuphakeme 300–600—kude kakhulu kumaqhezu ase-labathi noma ase-pharmaceutical—ukuthi kwenziwe ukugxila nokususa ngokushesha kakhulu yonke iphethini elitholakala. Kuvumelwe kakhulu ukuthi lokhu kuvumelekile ukuguqula isilwane ngokuphakeme kufanele kutholenwe ngokuphakeme kokuhlukaniswa kwezilwane (laminar) futhi akukho ukuguqula ngokungafani (turbulence). Okunye okubalulekile kuyilo lokuguqula isilwane ngokuphakeme: izindawo zokuhlanzekileyo (isibonelo, izindawo zokusebenza kwe-EUV scanner) zihlanzekile ngokuphakeme kokuguqula isilwane ngokuphakeme kakhulu, bese ziguqulwa ngokuphakeme kancane kuphela ezindaweni zokugcina amasiko, emaphathini amahle, nezindawo zokusekela. Lokhu kugxila kwezindawo zokuhlanzekileyo—kubizwa ngokuthi kuyisibonelo sokuguqula isilwane ngokuphakeme phakathi kwezindawo ezibalulekileyo—kuyisibonelo sokuguqula isilwane ngokuphakeme phakathi kwezindawo ezibalulekileyo—kuyisibonelo sokuguqula isilwane ngokuphakeme phakathi kwezindawo ezibalulekileyo—kuyisibonelo sokuguqula isilwane ngokuphakeme phakathi kwezindawo ezibalulekileyo—kuyisibonelo sokuguqula isilwane ngokuphakeme phakathi kwezindawo ezibalulekileyo—kuyisibonelo sokuguqula isilwane ngokuphakeme phakathi kwezindawo ezibalulekileyo—kuyisibonelo sokuguqula isilwane ngokuphakeme phakathi kwezindawo ezibalulekileyo—kuyisibonelo sokuguqula isilwane ngokuphakeme phakathi kwezindawo ezibalulekileyo—kuyisibonelo sokuguqula isilwane ngokuphakeme phakathi kwezindawo ezibalulekileyo—kuyisibonelo sokuguqula isilwane ngokuphakeme phakathi kwezindawo ezibalulekileyo—kuyisibonelo sokuguqula isilwane ngokuphakeme phakathi kwezindawo ezibalulekileyo—kuyisibonelo sokuguqula isilwane ngokuphakeme phakathi kwezindawo ezibalulekileyo—kuyisibonelo sokuguqula isilwane ngokuphakeme phakathi kwezindawo ezibalulekileyo—kuyisibonelo sokuguqula isilwane ngokuphakeme phakathi kwezindawo ezibalulekileyo—kuyisibonelo......

Ukukhokha Kwemithambo: Ukuphatha Kwezilwanyana, Iziqu Zempilo, nokufiltrwa kwe-HEPA/ULPA

Umkhondo Wokuphatha Kwezilwanyana, Amaphuzu Okuphatha Kwezilwanyana Ngamahora, neziqu zempilo phakathi kwezikhundla zokuphatha kwe-ISO Class 3

Izihlangothi zesikhundla se-ISO Class 3 ziyaphendula kumapharamitha amathathu athambekile kakhulu: umoya wokuphuma ngokulahlekelwa, isivinini sokuguqula komoya, nokuthabatha kwamaphethini okuphakanyiswa komoya phakathi kwezikhundla. Isistimu se-HVAC isunika umoya owenziwa ngokuphuma ngokulahlekelwa ngumkhawulo we-0.45 m/s phezu kwezinye izikhundla ezibalulekile zokusebenza—okukhona ukuthi kusuke amaphakathi angaphezulu kwe-100 nm kuze kufike ekuphakanyiseni kwezinkundla zokugcina emhlabeni. Ngokudaniswa ne-≥360 ACH, lokhu kuvikela ukuthi izinto ezingavumelekile zokuphuma kuzwakala kanye nokuthunyelwa ngemizuzwana emibili. Ukuthabatha kwamaphethini okuphakanyiswa komoya we-≥15 Pa phakathi kwezikhundla ze-Class 3 nezikhundla zezinye ze-Class 5 noma 7 kuvikela ukuthi kungabi nokuqondana kwezinto ezingavumelekile ngokubuyisana kwezibonakaliso noma izinto ezilandelwayo. Ukuthuluzwa kuyasebenza ngokulingana nomphumela wokuhlukanisa: izifiltara ze-HEPA (99.97% @ 0.3 µm) zisebenza kuzwakala kwezikhundla zokucleanwa ngokujwayelekile, futhi izifiltara ze-ULPA (99.999% @ 0.12 µm) zivikela iziscanner ze-EUV, izintshayelelo zokuhlanganisa, namagumbi okugcina amaphethini. Ukuphakanyiswa komoya kuchazwa ngokuphindekeka ngamamanomitha amadigital amanqinile kanye nokuhlanganiswa kwi-Building Management System (BMS) ukufunda ngokushesha nokubeka amasignali okuhlanzekile.

Ukulawulwa kokushisa okunembile nokufuma kwe-critical lithography kanye nezinqubo ze-etch

I-EUV Lithography s I-Tight Environmental Tolerance: ±0.1°C no-4045% RH (±0.3%)

I-EUV lithography ifaka ukuvunyelwa okuqinile kakhulu kwemvelo ekukhiqizeni ama-semiconductor. Ukungazinzi okushisayo okungaphezu kuka-± 0,1°C kubangela ukwanda noma ukuncipha kwesikali se-nanometer ezingxenyeni ezibonakalayo nakuma-wafer esiliconokucekela phansi ukubhaliswa kokugqokwa nge-> 1 nm nge-shift engu-0,1°C. Ngesikhathi esifanayo, ukufudumala ngaphandle kwama-4045% RH (± 0.3%) kubangela ukuphazamiseka kokugxila ngenxa yezinguquko zemboni yokuphambuka kumagesi asele kanye nemiphumela yokushisa i-lens. Lezi zinzwa zisho ukuthi izinhlelo ze-HVAC akumelwe zinikeze ukunemba kokubekwa kuphela, kodwa ukuzinza kwesikhashana ukugcina ukuthempelwa kwe-±0.02°C emagumbini okugcinwa kwetempurechura ngokushesha kwezindlela zokuphakama kwezindlela zokuhlanza (EUV) noma izindlela zokubhala ngokuphakama kweplasma, futhi ukungafikanga kulezi zimithi ziyabangela ukuphulwa kwezindawo zokusebenza—izifundo zika-IMEC ne-TSMC zihambisana nokuthi ngalokho okuqondile kwe-0.05°C okungaphezu kwezimithi ziyabangela ukuvutha kwezindawo zokusebenza ngokuphakama kwe-0.8%.

Izindlela Zokusebenzisa I-HVAC Ezincane: Ukususa Umphumela Ngemibhalo Emibili, Izikhumba Zokuhlisa, Nokusebenzisa Izikhumba Zokuhlisa Ngokusebenzisa I-PID

Izinhlangano zezinhlangano zezinkampani zezinhlangano zezinkampani zisebenzisa izindlela ezintathu zokufinyelela ukugcina kwe-EUV:

• Ukususa umphumela ngemibhalo emibili kubandlula izikhumba zokususa umphumela (ukususa umphumela okuphelele) ngezikhumba zokuhlisa okwesikhathi esiphansi (ukusiza ekususeni kwe-RH ngokuphelele), kubangela ukuthi ukuthempelwa kwe-RH kuyaba ngokuphelele kwe-±0.3%, nangona kunezimboni zokuthempelwa kwe-RH kwezindawo zokusebenza noma kunezindlela zokusebenza ezinconywa ngokushesha
• Izikhumba zokuhlisa ngokuphuma kwezikhumba zokuhlisa zihlukanisa ukuhlisa okuphelele kwezinhlangano zokuhlanza—kunikeza ukugcina kwezindawo zokusebenza (±0.1°C) ngaphandle kokuthinta ukuthempelwa kwezinhlangano zokuhlanza noma ukuthempelwa kwezindawo zokusebenza eziphambili
• Izikhumba zokuhlisa ngokusebenzisa i-PID , kufundiswa ngokuphathelene nokuthintana kwesikhathi sokugcina kwezinkampani zokubala izinkinga zokugcina, kubhekiswe kusukela emaphakathi amahle ekuthintana kwezinkinga (isibonelo, kusuka kwezinkinga zokugcina zokugcina kwe-EUV), futhi kufikwa ekuthintaneni kwe-±0.05°C

Kusobonakala, lezi zindlela zikhuluma ngezinye izifundo zika-ASHRAE 110 (ukulawula ukuthi kunezilwane ezinkulu zokushisa) nokwe-IEST-RP-CC024.2 (ukubeka isikhathi sokushisa ngokuphelele kwezinhlobo zezinto ezingaphansi kwemibili), futhi zibeka ubuncinane bezimali zokusebenza kwezindawo ngokuphakeme kwe-35% kulokho okuhlelwe kahle kwezimali zokusebenza kwezindawo zokugcina ivolumu, izikolo zokushisa ezinye.

Ubukhulu Bekhona Nokubaluleka Kwemithambo Yokuqinisa Kwezindawo Zokuphatha Ukushisa Nokushisa

Emasemantiko akhulu, ukungafani kwezindawo zokuphatha ukushisa nokushisa—k even if kungaphezu kwezinsuku ezingu-90—kungabuyisela umkhakha wokugcina we-wafer noma kungabangela ukuthi izikhumba zizofakwa emsebenzini futhi zizofundiswa kabusha ngokufanayo. Ngoko ke, ukubaluleka kwenziwa ngokuphelele emithambeni yonke eyayibaluleke: izikhumba zokushisa, izifan, nezinpumpa zokushisa zokubaluleka (N+1); izihlathi zesikhumba esine zokuphatha ukushisa nokushisa (AHUs) ezisebenzisa izindawo ezihlanganayo; nokuphatha kwesikhathi sokuphatha ukushisa nokushisa ngokuphelele kwezinhlobo zokuphatha ukushisa nokushisa (BMS) nezidampela ezibaluleke. Kungasemthethweni wokubaluleka kwezindawo zokugcina izinhlobo zokugcina, izindawo zokugcina ziyathatha isikhathi sokubaluleka ngokuphelele. ukuguqula ngokuphatha ukuthi kungabuyiselwa ukuthumela okuzenzekelayo kufanele kwenziwe ngaphakathi kwemizuzwana engu-100, ngaphandle kokubonwa kokuguqula kwetempurete (±0.05°C), ukuchitha kwamafutha (±0.2% RH), noma ukuguqula kwesiphumo sesifunda (±2 Pa). Ukulandela isimo sokugcina ubuhlungu—ukulandela ukuphambana kwesibhakabhaka, ukuthembana kwesikhathi semotora, ukuguqula kwetempurete phakathi kwe-coil, nokuguqula kwesiphumo sesifunda sesifunda—kusiza ekwenzeni ukugcina ngokweminyaka. Le mfundo yokuqinisa ubuhlungu, eyisikhiwo sesifunda se-SEMI S2 ne-ISO 13374, iyinika ubuhlungu obungaphezulu kwe-99.999%, ibuyisela izinkampani zezinkampani eziningi zezimali ezingaphezulu kwezimilioni, futhi ibuyisela ubuhlungu bokuphatha kwezinkampani zezimali ezingaphezulu kwezimilioni, futhi ibuyisela ubuhlungu bokuphatha kwezinkampani zezimali ezingaphezulu kwezimilioni, futhi ibuyisela ubuhlungu bokuphatha kwezinkampani zezimali ezingaphezulu kwezimilioni, futhi ibuyisela ubuhlungu bokuphatha kwezinkampani zezimali ezingaphezulu kwezimilioni, futhi ibuyisela ubuhlungu bokuphatha kwezinkampani zezimali ezingaphezulu kwezimilioni, futhi ibuyisela ubuhlungu bokuphatha kwezinkampani zezimali ezingaphezulu kwezimilioni, futhi ibuyisela ubuhlungu bokuphatha kwezinkampani zezimali ezingaphezulu kwezimilioni, futhi ibuyisela ubuhlungu bokuphatha kwezinkampani zezimali ezingaphezulu kwezimilioni, futhi ibuyisela ubuhlungu bokuphatha kwezinkampani zezimali ezingaphezulu kwezimilioni, futhi ibuyisela ubuhlungu bokuphatha kwezinkampani zezimali ezingaphezulu kwezimilioni, futhi ibuyisela ubuhlungu bokuphatha kwezinkampani zezimali ezingaphezulu kwezimilioni, futhi ibuyisela ubuhlungu bokuphatha kwezinkampani zezimali ezingaphezulu kwezimilioni, futhi ibuyisela ubuhlungu bokuphatha kwezinkampani zez......

Imibuzo Evame Ukubuzwa

Kungani izinhlangano zezokuphatha amafutha aziningi azingakwazi ukuphatha izindawo zokwenza izinto ngaphansi kwe-10nm?

Izinhlangano zezokuphatha amafutha ezigcina zingakhiwa ngokuphelele kwesifunda, ukuphatha kwetempurete, nokuphatha kwesikhathi sokuphatha amafutha okufanele kulezi zindawo ezisemthembekileyo, futhi zibangela ukuthi kubhekwe noma kusobala.

Ubukhulu bekuphatha kwamafutha ngokulahla kuyiphi na?

Ukuvula kwendlela yokufihla kwe-laminar kususa ukuthi kubhekwe ngokuphambuka, okunika ukuthi izinto ezingavumelekile zihlukunyezwe endaweni yabo kodwa akahliwanga kabusha, okuyisisekelo sokugcina ukuphakanyiswa kwe-sub-nanometer.

Ukuthi isikhati ne-humidity kubuyiselwa njani emisebenzini esikhundleni?

Izinhlangano zezindaba zisetyenzisa ukususa ukuchitha kabili, ukufihla kwe-chilled beam, nokubuyisela ngokuphathelene nokuqondisa i-PID ukuze kugcinwe ukuthi kunezidingo ezinkulu zokuphakanyiswa kwe-±0.1°C ne-±0.3% RH.

Ukuthi ubukhona kwezinye izinqumo kuyasebenza njani ekubeni kwe-HVAC yecleanroom?

Ukubukhona kwezinye izinqumo kusiza ukusebenza ngaphandle kokuphulwa, ngezinkomo ezifana nezinkomo zokuchitha ze-N+1 nezinkomo zokubuyisela zokubuyisela ukugcina izimo eziphambuka.